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A Novel Silicon Micromachined Cryogenic Capacitive Pressure

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dc.contributor.author Echternach, P.M. en_US
dc.contributor.author Hahn, I. en_US
dc.contributor.author Israelsson, U.E. en_US
dc.date.accessioned 2004-10-03T05:16:28Z
dc.date.available 2004-10-03T05:16:28Z
dc.date.issued 1995-07 en_US
dc.identifier.citation Columbus, OH en_US
dc.identifier.clearanceno 95-1156 en_US
dc.identifier.uri http://hdl.handle.net/2014/31473
dc.description.abstract A novel cryogenic capacitive pressure transducer was developed en_US
dc.format.extent 395974 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other Cryogenics Pressure Transducer Silicon Micromachining en_US
dc.title A Novel Silicon Micromachined Cryogenic Capacitive Pressure en_US


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