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Tunneling Tip Protection for a Bulk Micromachined Accelerometer

Show simple item record Zavracky, P.M. en_US McClelland, B. en_US Wang, J. en_US Hartley, F.T. en_US 2004-10-03T04:21:50Z 2004-10-03T04:21:50Z 1995 en_US
dc.identifier.citation USA en_US
dc.identifier.clearanceno 95-1049 en_US
dc.description.abstract Ultrasensitive accelerometers (on the order of 10-8 g) are needed by NASA for the measurement of orbital drag, and for seismic measurements on other planets. Silicon micromachined devices are attractive because they are light weight and smaller than conventional accelerometers. A method is presented here for fabricating a bulk micromachined accelerometer which incorporates a tunneling tip. en_US
dc.format.extent 730234 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other Accelerometer MEMS Sensor Micromachining en_US
dc.title Tunneling Tip Protection for a Bulk Micromachined Accelerometer en_US

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