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Tunneling Tip Protection for a Bulk Micromachined Accelerometer

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dc.contributor.author Zavracky, P.M. en_US
dc.contributor.author McClelland, B. en_US
dc.contributor.author Wang, J. en_US
dc.contributor.author Hartley, F.T. en_US
dc.date.accessioned 2004-10-03T04:21:50Z
dc.date.available 2004-10-03T04:21:50Z
dc.date.issued 1995 en_US
dc.identifier.citation USA en_US
dc.identifier.clearanceno 95-1049 en_US
dc.identifier.uri http://hdl.handle.net/2014/31189
dc.description.abstract Ultrasensitive accelerometers (on the order of 10-8 g) are needed by NASA for the measurement of orbital drag, and for seismic measurements on other planets. Silicon micromachined devices are attractive because they are light weight and smaller than conventional accelerometers. A method is presented here for fabricating a bulk micromachined accelerometer which incorporates a tunneling tip. en_US
dc.format.extent 730234 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other Accelerometer MEMS Sensor Micromachining en_US
dc.title Tunneling Tip Protection for a Bulk Micromachined Accelerometer en_US


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