JPL Technical Report Server

Depth Measurements Using Alpha Particles and Upsettable SRAMs

Show simple item record

dc.contributor.author Buehler, M. G. en_US
dc.contributor.author Reier, M.
dc.contributor.author Soli, G. A.
dc.date.accessioned 2004-10-01T21:55:16Z
dc.date.available 2004-10-01T21:55:16Z
dc.date.issued 1995-03
dc.identifier.citation IEEE Proceedings of the International Conference on Microelectronic Test Structures, Nara, Japan, March 1995 en_US
dc.identifier.clearanceno 95-0289
dc.identifier.uri http://hdl.handle.net/2014/29244
dc.description.abstract A custom designed SRAM was used to measure the thickness of integrated circuit over layers and the epi-layer thickness using alpha particles and a test SRAM. The over layer consists of oxide, nitride, metal, and junction regions. en_US
dc.format.extent 437837 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other upsettable SRAMs en_US
dc.title Depth Measurements Using Alpha Particles and Upsettable SRAMs en_US


Files in this item

This item appears in the following Collection(s)

Show simple item record

Search


Browse

My Account