Test Structures for Rapid Prototyping of Gas and Pressure Sensors

Buehler, M.; Cheng, L. J.; Martin, D.

dc.contributor.author	Buehler, M.	en_US
dc.contributor.author	Cheng, L. J.	en_US
dc.contributor.author	Martin, D.	en_US
dc.date.accessioned	2004-10-01T06:29:13Z
dc.date.available	2004-10-01T06:29:13Z
dc.date.issued	1996-10-20	en_US
dc.identifier.citation	Lake Tahoe, California, USA	en_US
dc.identifier.clearanceno	96-1875	en_US
dc.identifier.uri	http://hdl.handle.net/2014/27780
dc.description.abstract	A multi-project ceramic substrate was used in developing a gas sensor and pressure sensor. The ceramic substrate cantained 36 chips with six variants including sensors, process control monitors, and an interconnect ship. Tha gas sensor is being developed as an air quality monitor and the pressure gauge as a barometer.	en_US
dc.format.extent	365649 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.subject.other	ceramics ceramic substrate gas sensor pressure sensor reliability	en_US
dc.title	Test Structures for Rapid Prototyping of Gas and Pressure Sensors	en_US