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Test Structures for Rapid Prototyping of Gas and Pressure Sensors

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dc.contributor.author Buehler, M. en_US
dc.contributor.author Cheng, L. J. en_US
dc.contributor.author Martin, D. en_US
dc.date.accessioned 2004-10-01T06:29:13Z
dc.date.available 2004-10-01T06:29:13Z
dc.date.issued 1996-10-20 en_US
dc.identifier.citation Lake Tahoe, California, USA en_US
dc.identifier.clearanceno 96-1875 en_US
dc.identifier.uri http://hdl.handle.net/2014/27780
dc.description.abstract A multi-project ceramic substrate was used in developing a gas sensor and pressure sensor. The ceramic substrate cantained 36 chips with six variants including sensors, process control monitors, and an interconnect ship. Tha gas sensor is being developed as an air quality monitor and the pressure gauge as a barometer. en_US
dc.format.extent 365649 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other ceramics ceramic substrate gas sensor pressure sensor reliability en_US
dc.title Test Structures for Rapid Prototyping of Gas and Pressure Sensors en_US


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