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A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft

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dc.contributor.author Tang, T. K. en_US
dc.contributor.author Gutierrez, R. C. en_US
dc.contributor.author Stell, C. B. en_US
dc.contributor.author Vorperian, V. en_US
dc.contributor.author Arakaki, G. A. en_US
dc.contributor.author Rice, J. T. en_US
dc.contributor.author Li, W. J. en_US
dc.contributor.author Chakraborty, I. en_US
dc.contributor.author Shceglov, K. en_US
dc.contributor.author Wilcox, J. Z. en_US
dc.contributor.author Kaiser, W. J. en_US
dc.date.accessioned 2004-10-01T06:28:57Z
dc.date.available 2004-10-01T06:28:57Z
dc.date.issued 1997-01-26 en_US
dc.identifier.citation Hotel Nagoya Castle, Japan en_US
dc.identifier.clearanceno 96-1873 en_US
dc.identifier.uri http://hdl.handle.net/2014/27778
dc.description.abstract In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested. en_US
dc.format.extent 987933 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other MEMS micro-electromechanical system microspacecraft attitude control en_US
dc.title A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft en_US


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