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A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft

Show simple item record Tang, T. K. en_US Gutierrez, R. C. en_US Stell, C. B. en_US Vorperian, V. en_US Arakaki, G. A. en_US Rice, J. T. en_US Li, W. J. en_US Chakraborty, I. en_US Shceglov, K. en_US Wilcox, J. Z. en_US Kaiser, W. J. en_US 2004-10-01T06:28:57Z 2004-10-01T06:28:57Z 1997-01-26 en_US
dc.identifier.citation Hotel Nagoya Castle, Japan en_US
dc.identifier.clearanceno 96-1873 en_US
dc.description.abstract In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested. en_US
dc.format.extent 987933 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other MEMS micro-electromechanical system microspacecraft attitude control en_US
dc.title A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft en_US

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