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A Packaged Silicon MEMS Vibratory Gyroscope for Microspacecraft
Tang, T. K.; Gutierrez, R. C.; Stell, C. B.; Vorperian, V.; Arakaki, G. A.; Rice, J. T.; Li, W. J.; Chakraborty, I.; Shceglov, K.; Wilcox, J. Z.; Kaiser, W. J.
In this paper, we present recent work on the design, fabrication, and packaging of a silicon MIcro-Electro-Mechanical System (MEMS) microgyroscope designed for space applications. A hermetically sealed package that houses the microgyroscope and most of its control electronics has been built and tested.
