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Test Structures Applied to the Rapid Prototyping of Sensors

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dc.contributor.author Buehler, M. en_US
dc.contributor.author Chang, L-J. en_US
dc.contributor.author Martin, D. en_US
dc.date.accessioned 2004-10-01T05:25:16Z
dc.date.available 2004-10-01T05:25:16Z
dc.date.issued 1997-03-18 en_US
dc.identifier.citation Monterey, CA en_US
dc.identifier.clearanceno 96-1497 en_US
dc.identifier.uri http://hdl.handle.net/2014/27401
dc.description.abstract Recently, test structures were used to aid in the rapid development of a gas sensor and pressure sensor. These sensors were fabricated using co-fired ceramic technology and a multiproject approach. This talk will describe results obtained from a ceramic substrate which contained 36 chips with six variants including the sensors, process control monitors, and an interconnect chip. As far as the authors know, this is the first implementation of multi-projects in co-fired ceramic substrate. The gas sensor is being developed for the Space Shuttle and the pressure gage is being developed as a Martian barometer. en_US
dc.format.extent 160186 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other sensors ceramic substrate prototyping en_US
dc.title Test Structures Applied to the Rapid Prototyping of Sensors en_US


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