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Computation of Static Shapes and Voltages for Micromachined Deformable Mirrors with Nonlinear Electostatic Actuators

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dc.contributor.author Wang, P. K. C. en_US
dc.contributor.author Hadaegh, F. Y. en_US
dc.date.accessioned 2004-09-30T22:37:06Z
dc.date.available 2004-09-30T22:37:06Z
dc.date.issued 1996 en_US
dc.identifier.clearanceno 96-1178 en_US
dc.identifier.uri http://hdl.handle.net/2014/26147
dc.description.abstract In modeling micromachined deformable mirrors with electrostatic actuators whose gap spacings are of the same order of magnitude as that of the surface deformations, it is neccessary to use nonlinear models for the actuators. In this paper, we consider micromachined deformable mirrors modeled by a membrane or plate equation with nonlinear electrostatic actuator characteristics. en_US
dc.format.extent 1551914 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other mirrors deformable mirrors micromachining electrostatic actuators surface deformations optical systems adaptive optical systems en_US
dc.title Computation of Static Shapes and Voltages for Micromachined Deformable Mirrors with Nonlinear Electostatic Actuators en_US


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