Computation of Static Shapes and Voltages for Micromachined Deformable Mirrors with Nonlinear Electostatic Actuators

Abstract

In modeling micromachined deformable mirrors with electrostatic actuators whose gap spacings are of the same order of magnitude as that of the surface deformations, it is neccessary to use nonlinear models for the actuators. In this paper, we consider micromachined deformable mirrors modeled by a membrane or plate equation with nonlinear electrostatic actuator characteristics.