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Stress Determination of Micromembranes Using Laser Vibrometry

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dc.contributor.author Biswas, Abhijit en_US
dc.contributor.author Weller, Tom en_US
dc.contributor.author Katehi, Linda P.B. en_US
dc.date.accessioned 2004-09-29T22:29:57Z
dc.date.available 2004-09-29T22:29:57Z
dc.date.issued 1996 en_US
dc.identifier.clearanceno 96-0082 en_US
dc.identifier.uri http://hdl.handle.net/2014/23635
dc.description.abstract A laser vibrometry based dynamic technique for biaxial residual stress determination in micromembranes is reported. en_US
dc.format.extent 329818 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other laser vibrometry micromembrane ultrasonic pressure en_US
dc.title Stress Determination of Micromembranes Using Laser Vibrometry en_US


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