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Taguchi Method Applied in Optimization of Shipley 5740 Positive Resist Deposition
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Taguchi Method Applied in Optimization of Shipley 5740 Positive Resist Deposition
Hui, Allan
;
Wiberg, Dean V.
;
Blosiu, Julian
URI:
http://hdl.handle.net/2014/22699
Date:
1997-02-22
Citation:
Santa Clara, California, USA
Abstract:
Taguchi Methods of Robust Design Presents a way to optimize output process performance through organized experiments, by using orthogonal arrays for the evaluation of the process controlleable parameters.
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JPL TRS 1992+
JPL TRS 1992+
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