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Taguchi Method Applied in Optimization of Shipley 5740 Positive Resist Deposition

Taguchi Method Applied in Optimization of Shipley 5740 Positive Resist Deposition

Hui, Allan; Wiberg, Dean V.; Blosiu, Julian
URI: http://hdl.handle.net/2014/22699
Date: 1997-02-22
Citation: Santa Clara, California, USA

Abstract:

Taguchi Methods of Robust Design Presents a way to optimize output process performance through organized experiments, by using orthogonal arrays for the evaluation of the process controlleable parameters.

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