LIGA Fabricated X-Ray Collimating Grid for Tiled Arrays

dc.contributor.author	Wiberg, D. V.	en_US
dc.contributor.author	Hecht, M. H.	en_US
dc.contributor.author	Brennen, R. A.	en_US
dc.contributor.author	Bonivert, W.	en_US
dc.contributor.author	Hruby, J.	en_US
dc.contributor.author	Jackson, K.	en_US
dc.date.accessioned	2004-09-25T23:56:51Z
dc.date.available	2004-09-25T23:56:51Z
dc.date.issued	1997-06-21	en_US
dc.identifier.citation	Madison, Wisconsin, USA	en_US
dc.identifier.clearanceno	97-0235	en_US
dc.identifier.uri	http://hdl.handle.net/2014/21831
dc.format.extent	16893 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.subject.other	collimating grids LIGA microelectroplating MEMS X-ray imaging	en_US
dc.title	LIGA Fabricated X-Ray Collimating Grid for Tiled Arrays	en_US