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LIGA Fabricated X-Ray Collimating Grid for Tiled Arrays

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dc.contributor.author Wiberg, D. V. en_US
dc.contributor.author Hecht, M. H. en_US
dc.contributor.author Brennen, R. A. en_US
dc.contributor.author Bonivert, W. en_US
dc.contributor.author Hruby, J. en_US
dc.contributor.author Jackson, K. en_US
dc.date.accessioned 2004-09-25T23:56:51Z
dc.date.available 2004-09-25T23:56:51Z
dc.date.issued 1997-06-21 en_US
dc.identifier.citation Madison, Wisconsin, USA en_US
dc.identifier.clearanceno 97-0235 en_US
dc.identifier.uri http://hdl.handle.net/2014/21831
dc.format.extent 16893 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other collimating grids LIGA microelectroplating MEMS X-ray imaging en_US
dc.title LIGA Fabricated X-Ray Collimating Grid for Tiled Arrays en_US


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