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Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device for Nondestructive Evaluation (NDE) Health Monitoring Applications for International Space Station (ISS)

Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device for Nondestructive Evaluation (NDE) Health Monitoring Applications for International Space Station (ISS)

Ramesham, R.; Olivas, J.; Stokes, S.; Wilson, W.; Generazio, E.
URI: http://hdl.handle.net/2014/20583
Date: 1998-11-01
Citation: MTG: Nanospace 98 - to the Planets and Beyond
Houston, TX, U.S.A.

Abstract:

This paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited, multilayer, giant magnetoresistive field sensor.

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