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Thick Film UV Lithography Fabrication of Large Area, Fine Pitch Collimating Grids for X-Ray Astronomy
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Thick Film UV Lithography Fabrication of Large Area, Fine Pitch Collimating Grids for X-Ray Astronomy
Wiberg, D.
;
White, V.
;
Shcheglov, K.
;
Bonivert, W.
;
Hruby, J.
;
van Beek, F.
;
Dennis, B.
;
Hurford, G.
;
Lang, F.
;
Jackson, K.
URI:
http://hdl.handle.net/2014/20548
Date:
1999-03-30
Citation:
MTG: Microelectromechanicals Systems
Paris, France
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JPL TRS 1992+
JPL TRS 1992+
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