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The Effects of Radiation on the Resonant Frequency of a Polysilicon Microstructure

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dc.contributor.author Stark, B. en_US
dc.contributor.author Berstein, J. en_US
dc.contributor.author Lawton, R. en_US
dc.date.accessioned 2004-09-25
dc.date.available 2004-09-25
dc.date.issued 1998-08-04 en_US
dc.identifier.citation Micro-Electro-Mecanical Systems Reliability & Qualification en_US
dc.identifier.citation Pasadena, CA, U.S.A. en_US
dc.identifier.clearanceno 98-1238 en_US
dc.identifier.uri http://hdl.handle.net/2014/20323
dc.description.abstract A mechanical microstructure was exposed to 10 Mrad of Gamma Rays from Cobalt-60 source to examine the effects of possible lattice damage upon the Young's modulus of polysilicon. en_US
dc.format.extent 262410 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other Polysilicon Microstructure Radiation on the Resonant Frequency Gamma Rays MEMS Systems Sandia National Laboratories en_US
dc.title The Effects of Radiation on the Resonant Frequency of a Polysilicon Microstructure en_US


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