JPL Technical Report Server

The Effects of Radiation on the Resonant Frequency of a Polysilicon Microstructure

The Effects of Radiation on the Resonant Frequency of a Polysilicon Microstructure

Stark, B.; Berstein, J.; Lawton, R.
URI: http://hdl.handle.net/2014/20323
Date: 1998-08-04
Citation: Micro-Electro-Mecanical Systems Reliability & Qualification
Pasadena, CA, U.S.A.

Abstract:

A mechanical microstructure was exposed to 10 Mrad of Gamma Rays from Cobalt-60 source to examine the effects of possible lattice damage upon the Young's modulus of polysilicon.

Show full item record

Items in TRS are protected by copyright, but are furnished with U.S. government purpose use rights.

Files in this item

Thumbnail
Name: 98-1238.pdf
Size: 256.2Kb
Format: PDF
View/Open

This item appears in the following Collection(s)

Search


Browse

My Account