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Micro-Precision Interferometer: Evaluation of New Disturbance Isolation Solutions

Micro-Precision Interferometer: Evaluation of New Disturbance Isolation Solutions

Neat, G.; O'Brien, J.; Goullioud, R.
URI: http://hdl.handle.net/2014/19012
Date: 1998-03
Citation: 5th International Symposium on Smart Structures and Materials
San Diego, CA, USA

Abstract:

This paper describes a benchmark to assess performance of six-axis vibration isolation systems.

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