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Piezopumps Using no Physically Moving Parts

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dc.contributor.author Chang, Z. en_US
dc.contributor.author Bar-Cohen, Y. en_US
dc.date.accessioned 2004-09-24T16:26:43Z
dc.date.available 2004-09-24T16:26:43Z
dc.date.issued 1999-07-21 en_US
dc.identifier.citation NASA/JPL Workshop on Miniature Vacuum Pump Tech. en_US
dc.identifier.citation Glendale, CA, USA en_US
dc.identifier.clearanceno 99-1261 en_US
dc.identifier.uri http://hdl.handle.net/2014/17811
dc.format.extent 3649701 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other Piezoelectric material elastic wave pump en_US
dc.title Piezopumps Using no Physically Moving Parts en_US


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