Piezopumps Using no Physically Moving Parts

dc.contributor.author	Chang, Z.	en_US
dc.contributor.author	Bar-Cohen, Y.	en_US
dc.date.accessioned	2004-09-24T16:26:43Z
dc.date.available	2004-09-24T16:26:43Z
dc.date.issued	1999-07-21	en_US
dc.identifier.citation	NASA/JPL Workshop on Miniature Vacuum Pump Tech.	en_US
dc.identifier.citation	Glendale, CA, USA	en_US
dc.identifier.clearanceno	99-1261	en_US
dc.identifier.uri	http://hdl.handle.net/2014/17811
dc.format.extent	3649701 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.subject.other	Piezoelectric material elastic wave pump	en_US
dc.title	Piezopumps Using no Physically Moving Parts	en_US