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Microwave Induced Direct Bonding of Single Crystal Silicon Wafers

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dc.contributor.author Budraa, N. en_US
dc.contributor.author Jackson, H. en_US
dc.contributor.author Barmatz, M. en_US
dc.date.accessioned 2004-09-24T16:06:23Z
dc.date.available 2004-09-24T16:06:23Z
dc.date.issued 1999-09-17 en_US
dc.identifier.citation 7th International Conference on Microwave and HF Heating en_US
dc.identifier.citation Spain en_US
dc.identifier.clearanceno 99-1070 en_US
dc.identifier.uri http://hdl.handle.net/2014/17639
dc.format.extent 321853 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other single-crystal silicon wafers single mode microwave cavity surface to surface bonding metallic layer magnetic field en_US
dc.title Microwave Induced Direct Bonding of Single Crystal Silicon Wafers en_US


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