Microwave Induced Direct Bonding of Single Crystal Silicon Wafers

dc.contributor.author	Budraa, N.	en_US
dc.contributor.author	Jackson, H.	en_US
dc.contributor.author	Barmatz, M.	en_US
dc.date.accessioned	2004-09-24T16:06:23Z
dc.date.available	2004-09-24T16:06:23Z
dc.date.issued	1999-09-17	en_US
dc.identifier.citation	7th International Conference on Microwave and HF Heating	en_US
dc.identifier.citation	Spain	en_US
dc.identifier.clearanceno	99-1070	en_US
dc.identifier.uri	http://hdl.handle.net/2014/17639
dc.format.extent	321853 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.subject.other	single-crystal silicon wafers single mode microwave cavity surface to surface bonding metallic layer magnetic field	en_US
dc.title	Microwave Induced Direct Bonding of Single Crystal Silicon Wafers	en_US