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Fabrication and Characterization of Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device

Fabrication and Characterization of Giant Magnetoresistive (GMR) Sensor Microelectromechanical System (MEMS) Device

Ramesham, R.; Olivas, J.; Stokes, S.; Wilson, W.; Generazio, E.
URI: http://hdl.handle.net/2014/16808
Date: 1999-01
Citation: Thin Solid Films
USA

Abstract:

This paper discusses the fabrication aspects of a sensor device that is based on a sputter deposited multilayer giant magnetoresistive (GMR) sensor. The device consists of a micromachined microstructure (membrane), GMR sensor, and a sputtered hard magnetic thin film element on to microstructure.

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