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A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-nanometer Surface Metrology

A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-nanometer Surface Metrology

Zhao, F.; Logan, J.; Shaklan, S.; Shao, M.
URI: http://hdl.handle.net/2014/16646
Date: 1999-06-16
Citation: Optical Engineering for Sensing and Nanotechnology
Yokohama, Japan

Abstract:

A multi-channel heterodyne laser interferometer is proposed for the JPL Thermo-Opto-Mechanical Testbed, which requires the measurement of optical surface deformations at the sub-nanometer level.

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