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Fabrication of micro actuators for a MEMS deformable mirror by membrane transfer

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dc.contributor.author Yang, E. H. en_US
dc.contributor.author Wiberg, D. V. en_US
dc.contributor.author Dekany, R. G. en_US
dc.date.accessioned 2004-09-23T22:08:45Z
dc.date.available 2004-09-23T22:08:45Z
dc.date.issued 2001-06-10 en_US
dc.identifier.citation Transducers '01 Conference en_US
dc.identifier.citation Munich, Germany en_US
dc.identifier.clearanceno 00-2545 en_US
dc.identifier.uri http://hdl.handle.net/2014/16484
dc.format.extent 800669 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other deformable mirror continuous membrane membrane transfer en_US
dc.title Fabrication of micro actuators for a MEMS deformable mirror by membrane transfer en_US


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