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Commercial-Off-The-Shelf Microelectromechanical Systems

Show simple item record Rameshan, R. en_US Ghaffarian, R. en_US 2004-09-23T17:14:43Z 2004-09-23T17:14:43Z 2000-02-28 en_US
dc.identifier.citation NEPCON 2000 en_US
dc.identifier.citation Anaheim, CA, USA en_US
dc.identifier.clearanceno 00-0011 en_US
dc.description.abstract Research and development of microelectromechanical systems (MEMS) has shown a significant promise for a variety of commercial applications. en_US
dc.format.extent 995556 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other COTS MEMS sensor reliability failure mechanisms en_US
dc.title Commercial-Off-The-Shelf Microelectromechanical Systems en_US

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