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A model for comprehensive studies in porosity in mesoporous low-K dielectrics

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dc.contributor.author Petkov, M. P. en_US
dc.date.accessioned 2004-09-23
dc.date.available 2004-09-23
dc.date.issued 2000-04-01 en_US
dc.identifier.citation MRS Spring 2002 Meeting en_US
dc.identifier.citation San Francisco, CA, USA en_US
dc.identifier.clearanceno 01-2352 en_US
dc.identifier.uri http://hdl.handle.net/2014/13423
dc.format.extent 36302 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other porosity low-k dielectrics percolation en_US
dc.title A model for comprehensive studies in porosity in mesoporous low-K dielectrics en_US


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