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A general approach to MEMS performance assurance

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dc.contributor.author Wellman, J. en_US
dc.date.accessioned 2004-09-22T23:39:30Z
dc.date.available 2004-09-22T23:39:30Z
dc.date.issued 2001
dc.identifier.clearanceno 01-1074
dc.identifier.uri http://hdl.handle.net/2014/12787
dc.format.extent 49056 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other micro-electromechanical systems reliabilty en_US
dc.title A general approach to MEMS performance assurance en_US


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