Heavy ion induced soft breakdown of thin gate oxides

Conley, J. F.; Suehle,  J. S.; Johnston,  A. H.; Wang,  B.; Miyahara,  T.; Vogel,  E. M.

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Heavy ion induced soft breakdown of thin gate oxides

Conley, J. F.; Suehle, J. S.; Johnston, A. H.; Wang, B.; Miyahara, T.; Vogel, E. M.

URI: http://hdl.handle.net/2014/12580

Date: 2001-03-27

Citation: Nuclear and Space Radiation Effects Conference 2001
Vancouver, Canada

Abstract:

Heavy ion induced soft and hard breakdown are investigated in thin gate oxides as a function of LET, fluence, and voltage applied during irradiation. It is found that post-irradiation oxide conduction is well described by the Sune quantum point contact model.

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