Demonstration of sub-angstrom cyclic nonlinearity using wavefront-division sampling with a common-path laser heterodyne interferometer

dc.contributor.author	Zhao, F.	en_US
dc.date.accessioned	2004-09-22T22:40:43Z
dc.date.available	2004-09-22T22:40:43Z
dc.date.issued	2001-11-10	en_US
dc.identifier.citation	American Society of Precision Engineering Annual Meeting	en_US
dc.identifier.citation	Arlington, Virginia, USA	en_US
dc.identifier.clearanceno	01-0732	en_US
dc.identifier.uri	http://hdl.handle.net/2014/12540
dc.format.extent	67926 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.subject.other	metrology laser interferometers hetrodyning nano-technology interferometry	en_US
dc.title	Demonstration of sub-angstrom cyclic nonlinearity using wavefront-division sampling with a common-path laser heterodyne interferometer	en_US