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Minimum dimension dimple analysis. MEMS Reliability Alliance Technical Report 36-02

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dc.contributor.author Lin, G. en_US
dc.contributor.author Lawton, R. en_US
dc.contributor.author Wellman, J. en_US
dc.contributor.author Phinney, L. en_US
dc.date.accessioned 2004-09-22T22:21:50Z
dc.date.available 2004-09-22T22:21:50Z
dc.date.issued 2000-07-14 en_US
dc.identifier.clearanceno 01-0068 en_US
dc.identifier.uri http://hdl.handle.net/2014/12168
dc.format.extent 101449 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other MEMS reliability analysis en_US
dc.title Minimum dimension dimple analysis. MEMS Reliability Alliance Technical Report 36-02 en_US


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