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Variable control MEMS valve for gas/liquid systems

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dc.contributor.author Yang, E. H. en_US
dc.date.accessioned 2004-09-22T21:35:43Z
dc.date.available 2004-09-22T21:35:43Z
dc.date.issued 2002-03-12 en_US
dc.identifier.citation Explorer Workshop en_US
dc.identifier.citation Washington D.C., USA en_US
dc.identifier.clearanceno 02-0338 en_US
dc.identifier.uri http://hdl.handle.net/2014/11747
dc.format.extent 1615920 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other deformable mirror microelectromechanical systems MEMS adaptive optics high stroke actuator membrane transfer segmented space telescope NGST inflatable reflector en_US
dc.title Variable control MEMS valve for gas/liquid systems en_US


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