Citation:Symposium on Design, Test, Integration, and Packaging Proceeding CAD, Design and Test Conference Cannes-Mandelieu, France
Abstract:
This paper reports on JPL's on-going research into MEMS gyroscopes. This paper will describe the gyroscope's fabrication-methods, a new 8-electrode layout developed to improve performance, and performance statistics of a batch of six gyroscopes recently rate tested.
