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A piezoelectric bimorph deformable mirror concept by wafer transfer for ultra large space telescopes

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dc.contributor.author Yang, E. H. en_US
dc.contributor.author Shcheglov, K. en_US
dc.date.accessioned 2004-09-22T21:30:17Z
dc.date.available 2004-09-22T21:30:17Z
dc.date.issued 2002-02-22 en_US
dc.identifier.citation SPIE International Symposium on Astronomical Telescopes and Instrumentation en_US
dc.identifier.citation Waikoloa, HI, USA en_US
dc.identifier.clearanceno 02-0118 en_US
dc.identifier.uri http://hdl.handle.net/2014/11601
dc.format.extent 1100782 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other deformable mirror microelectromechanical systems MEMS adaptive optics high stroke actuator membrane transfer segmented space telescope NGST inflatable reflector en_US
dc.title A piezoelectric bimorph deformable mirror concept by wafer transfer for ultra large space telescopes en_US


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