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Design and fabrication of a large vertical travel silicon inchworm microactuator for advanced segmented silicon space telescope

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Design and fabrication of a large vertical travel silicon inchworm microactuator for advanced segmented silicon space telescope

Yang, E.; Dekany, R.; Padin, S.
URI: http://hdl.handle.net/2014/11225
Date: 2003-01
Citation: SPIE Photonics West, Micromachining and Microfabrication Conference
San Jose, CA, USA

Abstract:

This paper describes a proof-of-concept inchworm actuator designed to provide nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space.

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