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Normally-closed, leak-tight piezoelectric microvalve under ultra-high upstream pressure for integrated mircopropulsion

Normally-closed, leak-tight piezoelectric microvalve under ultra-high upstream pressure for integrated mircopropulsion

Yang, E.; Lee, C.; Mueller, J.
URI: http://hdl.handle.net/2014/11071
Date: 2003-02-20
Citation: IEEE 16th International MEMS Conference
Kyoto, Japan

Abstract:

This paper presents a leak-tight piezoelectric microvalve, operating at extremely high upstream pressures for microspacecraft applications.

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