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Normally-closed, leak-tight piezoelectric microvalve under ultra-high upstream pressure for integrated mircopropulsion
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Normally-closed, leak-tight piezoelectric microvalve under ultra-high upstream pressure for integrated mircopropulsion
Yang, E.
;
Lee, C.
;
Mueller, J.
URI:
http://hdl.handle.net/2014/11071
Date:
2003-02-20
Citation:
IEEE 16th International MEMS Conference
Kyoto, Japan
Abstract:
This paper presents a leak-tight piezoelectric microvalve, operating at extremely high upstream pressures for microspacecraft applications.
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JPL TRS 1992+
JPL TRS 1992+
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