Thermoelectric microdevice fabrication process and evaluations at the Jet Propulsion Laboratory

Lim, J.; Snyder,  G. J.; Huang,  C. K.; Herman,  J. A.; Ryan,  M. A.; Fleurial,  J. P.

dc.contributor.author	Lim, J.	en_US
dc.contributor.author	Snyder, G. J.	en_US
dc.contributor.author	Huang, C. K.	en_US
dc.contributor.author	Herman, J. A.	en_US
dc.contributor.author	Ryan, M. A.	en_US
dc.contributor.author	Fleurial, J. P.	en_US
dc.date.accessioned	2004-09-17T18:43:59Z
dc.date.available	2004-09-17T18:43:59Z
dc.date.issued	2002-08-26	en_US
dc.identifier.citation	21st International Conference on Thermoelectrics	en_US
dc.identifier.citation	Long Beach, CA, USA	en_US
dc.identifier.clearanceno	02-2433	en_US
dc.identifier.uri	http://hdl.handle.net/2014/10452
dc.description.abstract	A detailed step-by-step overview of the fabrication process will be given, as well as specifics in testing setups, results and future directions.	en_US
dc.format.extent	4231468 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.subject.other	thermoelectric microdevice micro-molding photolithography electrochemical deposition	en_US
dc.title	Thermoelectric microdevice fabrication process and evaluations at the Jet Propulsion Laboratory	en_US