dc.contributor.author |
Lim, J. |
en_US |
dc.contributor.author |
Snyder, G. J. |
en_US |
dc.contributor.author |
Huang, C. K. |
en_US |
dc.contributor.author |
Herman, J. A. |
en_US |
dc.contributor.author |
Ryan, M. A. |
en_US |
dc.contributor.author |
Fleurial, J. P. |
en_US |
dc.date.accessioned |
2004-09-17T18:43:59Z |
|
dc.date.available |
2004-09-17T18:43:59Z |
|
dc.date.issued |
2002-08-26 |
en_US |
dc.identifier.citation |
21st International Conference on Thermoelectrics |
en_US |
dc.identifier.citation |
Long Beach, CA, USA |
en_US |
dc.identifier.clearanceno |
02-2433 |
en_US |
dc.identifier.uri |
http://hdl.handle.net/2014/10452 |
|
dc.description.abstract |
A detailed step-by-step overview of the fabrication process will be given, as well as specifics in testing setups, results and future directions. |
en_US |
dc.format.extent |
4231468 bytes |
|
dc.format.mimetype |
application/pdf |
|
dc.language.iso |
en_US |
|
dc.subject.other |
thermoelectric microdevice micro-molding photolithography electrochemical deposition |
en_US |
dc.title |
Thermoelectric microdevice fabrication process and evaluations at the Jet Propulsion Laboratory |
en_US |