Thermoelectric microdevice fabrication process and evaluations at the Jet Propulsion Laboratory

Lim, J.; Snyder, G. J.; Huang, C. K.; Herman, J. A.; Ryan, M. A.; Fleurial, J. P.

Date: 2002-08-26

Citation: 21st International Conference on Thermoelectrics
Long Beach, CA, USA

A detailed step-by-step overview of the fabrication process will be given, as well as specifics in testing setups, results and future directions.

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