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Thermoelectric microdevice fabrication process and evaluations at the Jet Propulsion Laboratory
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Thermoelectric microdevice fabrication process and evaluations at the Jet Propulsion Laboratory
Lim, J.
;
Snyder, G. J.
;
Huang, C. K.
;
Herman, J. A.
;
Ryan, M. A.
;
Fleurial, J. P.
URI:
http://hdl.handle.net/2014/10452
Date:
2002-08-26
Citation:
21st International Conference on Thermoelectrics
Long Beach, CA, USA
Abstract:
A detailed step-by-step overview of the fabrication process will be given, as well as specifics in testing setups, results and future directions.
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JPL TRS 1992+
JPL TRS 1992+
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