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Normally-closed, leak-tight piezoelectric microvalve with ultra-high pressure upstream flow control for integrated micropropulsion

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dc.contributor.author Yang, E. H. en_US
dc.contributor.author Lee, C. en_US
dc.contributor.author Mueller, J. en_US
dc.date.accessioned 2004-09-17T18:16:18Z
dc.date.available 2004-09-17T18:16:18Z
dc.date.issued 2003-02-20 en_US
dc.identifier.citation IEEE 16th International MEMS Conference en_US
dc.identifier.citation Kyoto, Japan en_US
dc.identifier.clearanceno 02-2098 en_US
dc.identifier.uri http://hdl.handle.net/2014/10149
dc.format.extent 2931303 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other valve MEMS micropropulsion microspacecraft microthruster microfluidics en_US
dc.title Normally-closed, leak-tight piezoelectric microvalve with ultra-high pressure upstream flow control for integrated micropropulsion en_US


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