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Normally-closed, leak-tight piezoelectric microvalve with ultra-high pressure upstream flow control for integrated micropropulsion
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| dc.contributor.author | Yang, E. H. | en_US |
| dc.contributor.author | Lee, C. | en_US |
| dc.contributor.author | Mueller, J. | en_US |
| dc.date.accessioned | 2004-09-17T18:16:18Z | |
| dc.date.available | 2004-09-17T18:16:18Z | |
| dc.date.issued | 2003-02-20 | en_US |
| dc.identifier.citation | IEEE 16th International MEMS Conference | en_US |
| dc.identifier.citation | Kyoto, Japan | en_US |
| dc.identifier.clearanceno | 02-2098 | en_US |
| dc.identifier.uri | http://hdl.handle.net/2014/10149 | |
| dc.format.extent | 2931303 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | en_US | |
| dc.subject.other | valve MEMS micropropulsion microspacecraft microthruster microfluidics | en_US |
| dc.title | Normally-closed, leak-tight piezoelectric microvalve with ultra-high pressure upstream flow control for integrated micropropulsion | en_US |
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JPL TRS 1992+
JPL TRS 1992+