JPL Technical Report Server

NEMS for space and terrestrial applications

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dc.contributor.author Hartley, F. T. en_US
dc.contributor.author England, C. en_US
dc.date.accessioned 2004-09-17T18:11:28Z
dc.date.available 2004-09-17T18:11:28Z
dc.date.issued 2002-09-08 en_US
dc.identifier.citation COMS 2002 Conference en_US
dc.identifier.citation Ypsilanti, MI, USA en_US
dc.identifier.clearanceno 02-2118 en_US
dc.identifier.uri http://hdl.handle.net/2014/10031
dc.description.abstract Nanoscale electromechanical systems (NEMS) techniques were used to manufacture a membrane used to supply singly charged un-fractured ions for mass spectrometry. The innovative nanostructure, developed at the Jet Propulsion Laboratory (JPL), is a major advance over micromachined "volcano" field ionization devices and filaments or other energy-intensive devices, achieving nearly 100% ionization of gases and vapors without appreciable fracture. en_US
dc.format.extent 3110335 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.subject.other Nanoscale electromechanical systems NEMS soft ionization membrane SIM en_US
dc.title NEMS for space and terrestrial applications en_US


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