JPL Technical Report Server

Browsing by Subject "nanostructure fabrication"

Browsing by Subject "nanostructure fabrication"

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  • Wilson, Daniel W.; Muller, Richard E.; Echternach, Pierre M. (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2005., 2005-01-25)
    Direct-write electron-beam lithography has proven to be a powerful technique for fabricating a variety of micro- and nano-optical devices. Binary E-beam lithography is the workhorse technique for fabricating optical devices ...