JPL Technical Report Server

Browsing by Subject "nanochannel"

Browsing by Subject "nanochannel"

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  • Lee, Choonsup; Yang, Eui-Hyeok; Myung, Nosang V.; George, Thomas (Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2003., 2003-10-05)
    We have developed a new nanochannel fabrication technique using chemical-mechanical polishing (CMP) and thermal oxidation. With this technique, it is possible to control the width, length, and depth of the nanochannels ...