Bar-Cohen, Yoseph; Bridges, Denzel; Ma, Ying; Smith, Cary; Zhang, Zhi-Li; Hu, Anming; Rouleau, Christopher; Gosser, Zachary; Hong, Kunlun; Cheng, Jinquan
(Pasadena, CA: Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2018, 2018-06-18)
In this study we demonstrate a new method for depositing thick reactive multilayer films (RMFs) (thickness > 14 µm) by using Ti interlayer integration and substrate preheating during fabrication. These two adjustments are ...