Strauss, Karl F.; Joshi, Vikram; Ohno, Morifumo; Ida, Jiro; Nagatomo, Yoshiki
(Pasadena, CA : Jet Propulsion Laboratory, National Aeronautics and Space Administration, 2006., 2006-03-04)
We report for the first time the successful integration of Strontium-Bismuth-Tantalate ferroelectric capacitors on an SOI Substrate. We have verified that the unique processing requirements of SBT capacitors does not affect ...